Chemical vapor deposition
- Wikidata
- https://www.wikidata.org/wiki/Q505668
- OpenAlex ID
- https://openalex.org/C57410435 (API record)
- OpenAlex Description
- chemical process used in the semiconductor industry to produce thin films
- OpenAlex Level [?]
- 2
Broader Concepts
Narrower Concepts
- Electron beam physical vapor deposition
- Material properties of diamond
- Plasma-enhanced chemical vapor deposition
- Remote plasma
- Synthetic diamond
- Vapor–liquid–solid method
Associated Authors
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