Electron-beam lithography
- Wikidata
- https://www.wikidata.org/wiki/Q256845
- OpenAlex ID
- https://openalex.org/C200274948 (API record)
- OpenAlex Description
- Lithographic technique that uses a scanning beam of electrons
- OpenAlex Level [?]
- 4
Broader Concepts
Narrower Concepts
- Hydrogen silsesquioxane
- Maskless lithography
- Next-generation lithography
- Proximity effect (electron beam lithography)
- Stencil lithography
Associated Authors
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